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Professional Manufacture sf6 cf4 gas mixtures UZBEKISTAN

Professional Manufacture sf6 cf4 gas mixtures UZBEKISTAN

Chemistry studies of SF6/CF4, SF6/O2 and CF4/O2 gas phase.In this work, mass spectrometry and optical emission spectroscopy techniques were used to monitor the molecular and atomic neutral species during SF 6 /CF 4, SF 6 /O 2 and CF 4 /O 2 plasmas generated in a radio-frequency Hollow Cathode Reactive Ion Etching (HCRIE) reactor keeping constant the following operational conditions: total gas flow rate, gas pressure, and discharge power.Cited by: 10

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